Khoom piav qhia:

· Cov khoom siv taw qhia:

Magnetron sputtering txheej tshuab yog lub cev vapor deposition tshuab uas siv magnetic teb thiab ion sib cuam tshuam los npaj nyias zaj duab xis. Lub Magnetron Sputtering txheej tshuab siv lub tuam txhab cov cuab yeej pov thawj tseem ceeb: Ionbeam Ntxuav + Magnetron sputtering qhov chaw. Nyob rau hauv lub tshuab nqus tsev chamber, ib puag ncig mus txog lub siab nqus lub xeev los ntawm lub tshuab nqus tsev vacuum. Tom qab ntawd, los ntawm glow discharge los yog xov tooj cua zaus hluav taws xob, lub hom phiaj nto yog qhib kom ionize cov roj atoms ua hauj lwm los yog molecules thiab tsim ib plasma. Tom qab ntawd, los ntawm kev siv ib qho chaw sib nqus, cov ions raug tswj los ntawm qhov chaw sib nqus, ua rau muaj qhov tshwm sim ntawm kev tsoo ntawm lub hom phiaj. Lub ion beam collides nrog rau saum npoo ntawm lub hom phiaj, ua rau lub atoms los yog molecules ntawm lub hom phiaj rau sputter thiab tso rau ntawm lub substrate nto ntawm ib tug siab ceev los ua ib tug zaj duab xis. Lub zog ntawm ion beam tuaj yeem hloov kho, thiab cov qauv thiab cov khoom ntawm cov yeeb yaj kiab tuaj yeem hloov tau los ntawm kev tswj cov ion beam zog thiab ntom. Lub tshuab magnetron sputtering txheej tshuab txais tag nrho cov kev tswj tsis siv neeg, kev sib xyaw ua ke ntawm kev ua kom zoo, lub zog siab, kev ruaj ntseg zoo, kev ua haujlwm yooj yim thiab kev saib xyuas yooj yim. Lub tshuab magnetron sputtering yog tsim rau txheej txheej txheej thiab batch txheej kev pabcuam.

· Cov khoom zoo:

nthuav qhia ceev ceev deposition ceev;

nthuav qhia Tsawg substrate kub nce;

nthuav qhia Kev puas tsuaj rau cov txheej membrane me me;

nthuav qhia zoo membrane bonding;

Qhia High film purity, zoo ceev, zoo zaj duab xis uniformity;

qhia tau zoo repeatability;

nthuav qhia tsim nyog rau ntau yam khoom siv;

Qhia yooj yim kom paub txog kev lag luam;

nthuav qhia Cov muaj pes tsawg leeg ntawm cov yeeb yaj kiab txheej yog ze rau ntawm cov khoom siv.

nthuav qhia Cov zaj duab xis txheej yog zoo;

qhia tsis zoo tsis ncaj ncees yog siv rau lub workpiece;

nthuav qhia Composite hom phiaj txheej txheem.

Daim ntawv thov teb:

nthuav qhia Microelectronics: Magnetron sputtering txheej tshuab yog siv nyob rau hauv lub tshav pob ntawm microelectronics rau kev npaj cov hlau hlau, hlau kub dab dej, lithographic qhov ncauj qhov ntswg thiab lwm yam tseem ceeb Cheebtsam;

nthuav qhia Optical teb: Hauv thaj chaw ntawm optics, magnetron sputtering txheej tshuab yog siv los tsim cov khoom siv kho qhov muag xws li lo ntsiab muag, lim, iav, thiab lwm yam.

nthuav qhia Tshuaj: magnetron sputtering txheej tshuab yog siv los npaj catalysts, sensors thiab lwm yam tshuaj lom neeg;

nthuav qhia Machining teb: Hauv kev ua haujlwm ntawm machining, thev naus laus zis yog siv los txhim kho qhov tawv tawv, hnav tsis kam thiab corrosion tsis kam ntawm cov khoom siv tshuab;

nthuav qhia Kho kom zoo nkauj teb: magnetron sputtering txheej tshuab yog siv los tsim ntau yam zoo nkauj thiab ruaj khov zaj duab xis;

nthuav qhia cov khoom siv hluav taws xob hloov tau yooj yim: Magnetron sputtering txheej tshuab ua lub luag haujlwm tseem ceeb hauv cov ntaub ntawv hloov tau yooj yim, e- cov phau ntawv, lub hnub ci hloov tau yooj yim thiab lwm yam khoom tsim tawm;

nthuav qhia Lub Zog thiab kev tiv thaiv ib puag ncig: magnetron sputtering txheej tshuab yog siv los npaj lub hnub ci cua sov zaj duab xis, nyias zaj duab xis hnub ci thiab lwm yam.

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