Product Overview
PVD Composite Thin Film Equipment yog ib lub tshuab nqus tsev vacuum deposition platform engineered rau depositing multi-layer, alloy, thiab nanocomposite nyias films. Kev sib koom ua ke magnetron sputtering thiab cathodic arc qhov chaw nyob rau hauv ib lub tshuab nqus tsev, lub kaw lus ua kom muaj kev tswj xyuas meej ntawm cov yeeb yaj kiab microstructure, residual stress, thiab interfacial adhesion. Ua rau kev tsim khoom tas mus li thiab qib siab R & D, lub platform haum rau hlau, ceramic, thiab polymer substrates nrog scalable chamber geometries.
-
![PVD Composite Vacuum Deposition Equipment]()
PVD Composite Vacuum Deposition EquipmentQhov kev lag luam PVD lub tshuab nqus tsev vacuum no sib xyaw ua ke ntau cov txheej txheem tso rau hauv ib qho chaw ib puag ncig kom tso cov khoom sib xws, ntau- txheej hlau, alloy, lossis...saib ntxiv -
![PVD Hybrid Thin Film Deposition System]()
PVD Hybrid Thin Film Deposition SystemPVD Hybrid Thin Film Deposition System integrates thermal evaporation, electron beam (e{0}}beam) evaporation, thiab RF/DC magnetron sputtering hauv ib lub tshuab nqus tsev. Lub platform no ua kom...saib ntxiv -
![PVD Ntau-Cov Khoom Siv Ua Yeeb Yam Nyias]()
PVD Ntau-Cov Khoom Siv Ua Yeeb Yam NyiasPVD Multi- Txheej Txheem Nyias Zaj Duab Xis yog ib qho kev sib xyaw ua ke ntawm lub tshuab nqus tsev vacuum uas tsim los ua ke ntau yam nyias- cov txheej txheem tsim zaj duab xis-xws li RF / DC...saib ntxiv -
![PVD Composite Deposition Equipment]()
PVD Composite Deposition EquipmentIndustrial PVD Composite Deposition Equipment yog engineered rau ntau-cov khoom, ntau- txheej, thiab nano- sib xyaw nyias- zaj duab xis fabrication. Lub kaw lus sib koom ua ke thermal evaporation,...saib ntxiv -
![PVD Composite Thin Film System]()
PVD Composite Thin Film SystemKev lag luam- qib nqus txheej txheej ua ke nrog magnetron sputtering (RF/DC/HiPIMS) thiab cathodic arc evaporation. Tsim los ua ntu zus, ntau- txheej, hlau, thiab nano- sib xyaw nyias- zaj duab...saib ntxiv -
![PVD Composite Thin Film Equipment]()
PVD Composite Thin Film EquipmentPVD Composite Thin Film Equipment yog lub tshuab nqus tsev ua haujlwm tsim los tsim cov txheej txheem ntau- txheej, alloy, thiab qib nyias zaj duab xis. Ua los ntawm modular 304L / 316L stainless...saib ntxiv
Technical Specifications
|
Parameter |
Specification Range |
|
Qhov kawg nqus siab |
<= 5.0 x 10^-5 Pa (Cryogenic/Turbomolecular pumping suite) |
|
Ua Haujlwm Siab |
0.1 Pa - 5.0 Pa |
|
Substrate kub |
Ambient rau 800℃(Kaw-loop PID tswj) |
|
Deposition Sources |
Configurable: DC / RF Magnetron Sputtering, Pulsed DC, Lim Cathodic Arc |
|
Thickness Uniformity |
< +/- 3% across standard 300 mm substrate carrier |
|
Chamber Khoom |
304L / 316L Stainless hlau, txhua yam hauv av thiab electro{2}} polished (Ra<= 0.4 um) |
|
Kev sib koom ua ke ntawm Kev Siv Hluav Taws Xob |
MF generators (10-100 kHz), RF generators (13.56 MHz), Pulsed DC bias |
|
Tswj System |
Muaj PLC + IPC nrog automated daim ntawv qhia ua tiav, interlock xyuas, thiab batch cov ntaub ntawv kaw |
Composite Deposition txheej txheem
Lub kaw lus siv hybrid lub cev vapor deposition architecture combining magnetron sputtering thiab cathodic arc technologies.
Multi-Source Synergy:
Kev ua haujlwm ib txhij lossis ua ntu zus ntawm ntau lub cathodes tso cai rau kev hloov pauv sai lossis qib kev sib xyaw ua ke thoob plaws hauv pawg zaj duab xis.
Ion Etching ua ntej-Kev ntxuav:
RF lossis DC plasma ntxuav theem tshem tawm cov oxides thiab cov kab mob saum npoo av ua ntej kev tso tawm kom ua kom cov txheej txheem ntau tshaj - mus rau - substrate adhesion.
Reactive Deposition Control:
Kaw -loop optical emission spectroscopy (OES) tswj cov tshuaj reactive gas (O2, N2, C2H2) kom tswj tau qhov chaw ruaj khov stoichiometry thiab tiv thaiv lub hom phiaj lom.
Substrate Biasing:
Synchronized pulsed bias fais fab khoom siv foob pob ua yeeb yaj kiab loj hlob nrog siab -zog ions, densifying microstructure thiab tailoring residual compressive stress.
Cov ntaub ntawv zaj duab xis
Cov cuab yeej txhawb nqa dav dav ntawm cov khoom siv rau kev ua haujlwm raws li kev xav tau:
Transition Hlau Nitrides & Carbides:
TiN, TiAlN, CrN, ZrN, TiCN rau hnav thiab corrosion kuj.
Nanocomposite & Multilayer Systems:
TiSiN, AlTiSiN, hlau / ceramic nanolayers rau huab hardness thiab siab -kub thermal stability.
Transparent Conductive Oxides (TCO):
ITO, AZO, IGZO rau kev siv optoelectronic thiab photovoltaic.
Pure Hlau & Alloys:
Ti, Cr, Al, Cu, Stainless Hlau, NiCr rau hluav taws xob tiv tauj thiab diffusion barrier txheej.
Daim ntawv thov
Cov cuab yeej txiav Precision:
Kev tso tawm ntawm super-nyuaj, qis- txhuam txheej (piv txwv li, TiAlN) ntawm carbide inserts, xyaum, thiab kawg-mills kom ncua kev ua hauj lwm lifespan nyob rau hauv siab thermal loads.
Automotive Cheebtsam:
Kev sib txhuam-txo thiab hnav- cov yeeb yaj kiab tiv taus ntawm lub nplhaib piston, cov roj txhaj tshuaj, thiab cov khoom sib dhos.
Optoelectronics & Zaub:
Tsawg-resistivity, siab- kis tau tus mob oxide txheej rau kov vaj huam sib luag thiab hnub ci cell substrates.
Cov cuab yeej kho mob:
Biocompatible thiab hnav- cov coatings resistant rau cov cuab yeej phais thiab orthopedic implants.
Customization & System Configuration
Engineering configurations raug yoog rau cov chaw tsim khoom tshwj xeeb thiab cov txheej txheem zaub mov txawv:
Chamber Loj:
Cylindrical lossis rectangular chamber xaiv xws li R&D batch systems (500 mm inch) mus rau loj -scale ntau lawm load-lock systems (1000 mm+).
01
Pumping Suite xaiv:
Sib piv cov hauv paus hniav tshuab, cov twj turbomolecular, thiab cov twj tso kua mis cryogenic raws li cov twj tso kua mis yuav tsum tau ua - lub sij hawm qis thiab roj av profile.
02
Substrate Fixturing:
Customized planetary rotation stages, 3-axis satellite rotation, los yog dov-to-roll modules tsim los rau complex 3D geometries los yog webs nruam.
03
Qib Automation:
Semi-automated manual load configurations los yog tag nrho automated nqus tsev vacuum hloov tshuab nrog robotic substrate tuav.
04
Manufacturing & Quality Control
Leak Detection:
Txhua lub tshuab nqus tsev nkag mus rau helium huab hwm coj spectrometer xau kuaj mus rau qhov pib ntawm <1 x 10^-10 Pa * m^3 / s.
Kev soj ntsuam Weld:
Lub tshuab nqus tsev-sab welds yog TIG welded, hauv av, thiab polished, ua raws li X-ray lossis dye penetrant tshuaj xyuas thaum thov.
Hluav taws xob & kev nyab xeeb ua raws:
Kev tswj vaj huam sib luag ua tau raws li NFPA 79 lossis CE / IEC cov qauv, muaj cov khoom siv sib cuam tshuam rau cov dej ntws, roj siab, thiab kev nyab xeeb hluav taws xob.
Factory Txais Kev Xeem (FAT):
Kev kuaj ua ntej- xa khoom xa tuaj suav nrog 72- teev tas li qhuav- khiav kev caij tsheb kauj vab, kev kuaj xyuas lub tshuab nqus tsev, thiab kuaj cov txheej txheem siv cov zaub mov tshwj xeeb.
Cov txheej txheem npaj qhov chaw:Cov ntaub ntawv uas yuav tsum tau muaj nyob rau hauv cov ntaub ntawv qhia txog kev siv hluav taws xob sib cuam tshuam (dej dej txias / siab, hluav taws xob load, compressed cua, tso pa).
Ntawm -Site Commissioning:Cov kws ua haujlwm hauv chaw ua haujlwm ua haujlwm ua haujlwm kho tshuab, kuaj xyuas lub tshuab nqus tsev, hluav taws xob khi-ins, thiab pib calibration.
Txheej txheem Recipe Tuning:On-site collaboration with client metallurgists and process engineers to lock in target film thickness, stress, and hardness parameters.
Kev them nyiaj yug Lifecycle:Tej thaj chaw deb diagnostics interface, localized spare parts inventory, thiab teem sij hawm tiv thaiv cov kev pab cuam.
FAQ
Peb paub zoo-paub tias yog ib qho ntawm cov khoom siv pvd nyias nyias cov khoom lag luam thiab cov muag khoom hauv Suav teb. Yog hais tias koj yuav mus yuav customized pvd composite nyias zaj duab xis khoom ua nyob rau hauv Tuam Tshoj, txais tos kom tau pricelist los ntawm peb lub hoobkas. Rau nqe kev sab laj, tiv tauj peb.
