Product Overview
Lub IAE-Series Ion-Assisted Evaporation Thin Film Equipment integrates lub cev vapor deposition (PVD) nrog tiag tiag - lub sij hawm ion beam bombardment. Los ntawm kev coj cov ions nquag mus rau lub substrate thaum lub sij hawm thermal los yog electron -beam evaporation, lub kaw lus hloov lub zog mus rau condensing adatoms, restructuring lub loj hlob zaj duab xis lub microstructure.
Qhov no kinetic zog hloov mus tshem tawm cov columnar voids, suppresses noo noo nqus, thiab xauv lub refractive index tiv thaiv ambient humidity hloov. Ua rau kev ua haujlwm tas mus li ntau- hloov pauv hauv cov kab hluav taws xob thiab cov khoom siv hluav taws xob, lub platform tuav cov substrates xws li siab - laser optics rau silicon wafers.
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![Ion{0}}Cov khoom siv nqus tsev vacuum]()
Ion{0}}Cov khoom siv nqus tsev vacuumLub Ion-Assisted Vacuum Evaporation System koom ua ke siab -nqus thermal lossis electron-beam evaporation qhov chaw nrog Kaufman- hom lossis End-Hall ion qhov chaw. Los ntawm kev sib tsoo cov zaj...saib ntxiv -
![Ion{0}}Assisted Thin Film Deposition System]()
Ion{0}}Assisted Thin Film Deposition SystemLub Ion-Assisted Thin Film Deposition System koom ua ke ntau- hnab tshos electron-beam/thermal evaporation nrog rau siab-kev ua tau zoo kawg-Hall lossis Kaufman- hom ion qhov chaw. Thaum lub sij...saib ntxiv -
![Ion Beam Assisted Evaporation Khoom]()
Ion Beam Assisted Evaporation KhoomLub IBAE system sib txuas cov hluav taws xob-beam lossis thermal evaporation nrog ib qho kev sib xyaw dav -beam ion qhov chaw. Ib txhij ion bombardment thaum lub sij hawm zaj duab xis loj hlob...saib ntxiv -
![Ion-Tshiab Cov Khoom Siv Hluav Taws Xob Cov Khoom Siv Hluav Taws Xob]()
Ion-Tshiab Cov Khoom Siv Hluav Taws Xob Cov Khoom Siv Hlu...IA-Series Ion-Assisted Thin Film Deposition Equipment integrates electron-beam thermal evaporation with a Kaufman or End-Hall ion source. Energetic ion bombardment (argon/oxygen mix) thaum lub sij...saib ntxiv -
![Ion{0}}Assisted Evaporation Thin Film System]()
Ion{0}}Assisted Evaporation Thin Film SystemLub Ion-Assisted Evaporation (IAE) Thin Film System integrates lub cev vapor deposition (PVD) nrog lub zog ion beam bombardment. Thaum lub sij hawm thermal los yog electron -beam evaporation, ib...saib ntxiv -
![Ion-Cov khoom siv evaporation nyias nyias]()
Ion-Cov khoom siv evaporation nyias nyiasIndustrial-qib Ion-Assisted Evaporation (IAE) system integrating multi-pocket electron-beam evaporation with an energic ion beam source (End-Hall or Kaufman configuration). Tiag -lub sij hawm ion...saib ntxiv
Technical Specifications
|
Parameter |
Specification |
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Qhov kawg Base Siab |
< 5.0 × 10⁻⁵ Pa (achieved within 45 mins via cryogenic/turbomolecular pumping) |
|
Evaporation Sources |
Multi-pocket E-beam phom (4 × 15cc txog 40cc) thiab cov khoom siv hluav taws xob tiv taus |
|
Ion Source Hom |
Gridless End-Hall / Kaufman- hom ion qhov chaw (beam voltage: 50 - 1500 V, ion tam sim no: 0.1 - 3 A) |
|
Zaj duab xis Thickness Tswj |
Quartz siv lead ua microbalance (QCM) + Optical monitoring system (OMS), precision ± 0.1 nm |
|
Substrate Fixturing |
Planetary rotation fixture, dome radius customized rau substrate geometry |
|
Substrate cua sov |
Radiant rhaub array, mus txog 350℃nrog ± 2℃PID uniformity |
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Tswj Architecture |
PLC + Industrial PC, automated daim ntawv qhia ua tiav, SECS / GEM cov ntaub ntawv ua raws |
Ion{0}}Txoj Kev Pab Cuam Tshuam
Vapor Generation:
Cov khoom yog evaporated los ntawm e-beam crucible lossis thermal nkoj ntawm kev tswj kev tso nyiaj (0.1 - 2.0 nm / s).
01
Momentum Hloov:
Lub zog ions (Ar⁺, O⁺) foob pob hluav taws ntawm substrate nto ib txhij nrog cov vapor flux los ntawm E- nqaj lossis qhov chaw thermal.
02
Kev hloov kho microstructure:
Ion cuam tshuam txhim kho adatom nto txav mus los, tiv thaiv kev loj hlob ntawm columnar grain thiab ua tiav nyob ze -bulk ntom (packing ntom> 99%).
03
Stoichiometry Kho:
Reactive ion pab (O₂) ua kom tiav oxidation ntawm sub{0}}oxides hauv cov hlau oxide zaj duab xis (piv txwv li, Ta₂O₅, Nb₂O₅, SiO₂), tshem tawm cov plua plav nqus hauv UV-NIR spectrum.
04
Cov ntaub ntawv zaj duab xis
Oxides:
SiO₂, Ta₂O₅, TiO₂, Nb₂O₅, HfO₂ (High refractive index stability rau optical filters).
Fluorides:
MgF₂, LaF₃ (Low refractive index layers for broadband AR coatings).
Hlau:
Al, Ag, Au, Ti (Adhesion layers and metallic reflectors).
Daim ntawv thov
Laser & Precision Optics:
Bandpass lim, dichroic tsom iav, thiab laser tiv thaiv coatings yuav tsum tau laser siab -induced puas threshold (LIDT) thiab xoom spectral hloov nyob rau hauv thermal stress.
LiDAR Cover iav:
Lub zog tiv thaiv-reflective (AR) thiab los tiv thaiv- cov yeeb yaj kiab nyias resistant rau huab cua hnyav sab nraum zoov.
Semiconductor Ntim:
Cov dej noo- thaiv thaiv cov txheej txheej thiab cov ntaub qhwv hlau uas tso rau ntawm qhov kub thiab txias.
Biomedical Sensors:
Biocompatible optical cuam tshuam txheej rau kev kuaj mob microfluidic chips.
Kev kho kom haum
Chambers thiab internal layouts yog engineered rau kev tsim hneev taw thiab cov txheej txheem yuav tsum tau ua:
Chamber Dimensions:
Scalable los ntawm R=600 mm R&D units rau R=1200 mm siab - muaj peev xwm ntau lawm systems.
Pumping Packages:
Configurable nrog Maglev turbomolecular twj tso kua mis, cryopumps, thiab hauv paus blower backing kab raws li gas load yuav tsum.
Kev koom ua ke Source:
Dual-Ion qhov chaw teeb tsa lossis co- teeb tsa kev teeb tsa rau cov hlau tsis sib xws thiab ntau- txheej gradient films.
Qib Automation:
Kev koom ua ke nrog automated cleanroom substrate transfer systems (EFEM / Vacuum cluster tools).
Kev Tswj Xyuas Zoo
Leak Detection:
Txhua lub tshuab nqus tsev vacuum yog helium leak-kuaj siv lub tshuab ntsuas huab cua (kawg tus nqi <1.0 × 10⁻¹⁰ Pa·m³/s).
Cheebtsam Traceability:
Lub tshuab nqus tsev vacuum, cov tswj huab hwm coj ntau (MFCs), thiab cov khoom siv hluav taws xob tau los ntawm cov khoom tsim nyog Tier-1 muaj npe (MKS, Inficon, VAT).
Factory Txais Kev Xeem (FAT):
Khiav- kuaj xyuas lub hauv paus siab, twj tso kua mis nkhaus, qhov chaw ruaj khov, thiab 24- teev tas mus li qhov khoob-chamber endurance ua ntej xa khoom.
Metrology Validation:
Cov qauv sau ua pov thawj ntawm spectrophotometer (transmittance/reflectance) thiab atomic force microscopy (surface roughness Ra <0.5 nm).
Installation & Technical Support
Phau Ntawv Qhia Kev Npaj Qhov Chaw:
Cov kev xav tau kev siv hluav taws xob tau muab ua ntej xa khoom (dej dej txias / siab, chav huv compressed cua, hluav taws xob faib, tso pa tawm).
Turnkey Commissioning:
Field service engineers lis mechanical assembly, nqus tsev vacuum -out, ion beam calibration, and initial process recipe sign-off on -site.
Kev cob qhia neeg ua haujlwm:
Kev tsim qauv tes- ntawm kev cob qhia npog cov kev tu niaj hnub, kev nyab xeeb ntawm lub tshuab nqus tsev, kev ua haujlwm software, thiab kev daws teeb meem.
Kev them nyiaj yug Lifecycle:
Tej thaj chaw deb diagnostic interface rau ceev software teeb meem; Cov khoom lag luam hauv cheeb tsam ntawm cov khoom siv tseem ceeb (filaments, crucibles, shields) xa tuaj hauv 48 teev.
FAQ
Peb tau zoo-paub tias yog ib qho ntawm cov ua ion-pab evaporation nyias zaj duab xis cov khoom lag luam thiab cov muag khoom hauv Suav teb. Yog hais tias koj yuav mus yuav customized ion - pab evaporation nyias zaj duab xis khoom ua nyob rau hauv Tuam Tshoj, txais tos kom tau pricelist los ntawm peb lub hoobkas. Rau nqe kev sab laj, tiv tauj peb.
