Product Overview
No Electron Beam Evaporation Thin Film Equipment yog engineered rau siab -precision lub cev vapor deposition (PVD). Siv lub siab tsom siab- lub zog hluav taws xob hluav taws xob rau cov khoom siv foob pob hluav taws, lub kaw lus ua tiav cov evaporation siab rau siab - melting- taw tes hlau, oxides, thiab cov khoom siv dielectric.
Ua los ntawm modular nqus tsev vacuum architecture, lub kaw lus haum rau ntau- hnab tshos electron phom, customizable substrate fixtures, thiab advanced nyob rau hauv -situ saib xyuas. Nws ua haujlwm rau R&D lub chaw soj nstuam thiab siab -thov cov kab ntau lawm uas xav tau kev tswj hwm nruj ntawm zaj duab xis stoichiometry, adhesion, thiab kev ua haujlwm kho qhov muag.
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![High Vacuum Electron Beam Evaporation Equipment]()
High Vacuum Electron Beam Evaporation EquipmentEBE-Series High Vacuum Electron Beam Evaporation System tso siab -purity nyias zaj duab xis rau kev siv kho qhov muag, semiconductor, thiab metallurgical. Los ntawm kev taw qhia cov kab hluav taws...saib ntxiv -
![Electron Beam Thin Film Deposition System]()
Electron Beam Thin Film Deposition SystemLub Electron Beam Thin Film Deposition System muab kev taw qhia, siab -purity PVD ua rau kev tshawb fawb thiab kev lag luam ntau lawm. Siv lub teeb tsom, hlau nplaum steered electron beam coj mus...saib ntxiv -
![Electron Beam Vacuum Evaporation Equipment]()
Electron Beam Vacuum Evaporation EquipmentQhov Electron Beam Vacuum Evaporation System no ua rau lub cev vapor deposition (PVD) ntawm siab -melting- taw tes hlau, oxides, thiab dielectrics. Los ntawm kev taw qhia cov kab hluav taws xob...saib ntxiv -
![Electron Beam Thin Film Deposition Equipment]()
Electron Beam Thin Film Deposition EquipmentQhov kev lag luam hluav taws xob hluav taws xob no siv hluav taws xob tsom hluav taws xob phom phom (3 kW txog 15 kW) kom ncaj qha siab - lub zog ceev fluxes rau hauv dej - txias tooj liab...saib ntxiv -
![Electron Beam Evaporation Thin Film System]()
Electron Beam Evaporation Thin Film SystemEBE-Series Electron Beam Evaporation System yog tsim los rau lub cev vapor deposition (PVD) ntawm siab- melting- taw tes hlau, dielectrics, thiab cov khoom siv kho qhov muag. Los ntawm kev siv cov...saib ntxiv -
![Electron Beam Evaporation Nyias zaj duab xis khoom]()
Electron Beam Evaporation Nyias zaj duab xis khoomEBE-V600 series yog kev lag luam- nplai lub cev vapor deposition (PVD) platform tsim los rau cov nyias nyias- zaj duab xis txheej ntawm cov khoom siv kho qhov muag, cov khoom siv semiconductor,...saib ntxiv
Technical Specifications
|
Parameter |
Specification Range |
Lus Cim / Cov Qauv Txheej Txheem |
|
Qhov kawg Base Siab |
< 5.0 × 10^-6 Pa |
Ua tiav los ntawm cryogenic los yog turbo- molecular pumping pawg |
|
Chamber Dimensions |
Customized (500mm txog 1200mm sab hauv txoj kab uas hla) |
304L / 316L stainless hlau, electro{2}} polished |
|
E-Gun Power Rating |
6 kW txog 15 kW (Multi-pocket sweep generators) |
Programmable beam deflection thiab ntau -crucible indexing |
|
Deposition Rate |
0.1nm/s rau 10nm/s |
Tiag -lub sijhawm kaw- voj tswj ntawm quartz siv lead ua saib |
|
Zaj duab xis Thickness Uniformity |
< ±1% to ±2% across standard substrates |
Planetary lossis dome substrate fixture nrog kev sib hloov ceev |
|
Substrate kub |
Ambient rau 800 degree |
Integrated radiant cua sov nrog PID thermal tawm tswv yim |
Cov cuab yeej tseem ceeb
Siab -Stability Electron Phom:
Nta sib nqus deflection thiab ntau- taw tes tsom mus tiv thaiv lub zos overheating ntawm cov khoom siv thiab tshem tawm nti thaum lub sij hawm reactive evaporation.
Modular Crucible Tsim:
Nruab nrog 4 mus rau 6-pocket indexable hearths, tso cai rau ntau txheej depositions tsis tawg lub nqus tsev vacuum.
Advanced Vacuum Interlock:
PLC- tswj pneumatic li qub, automated roughing/high-nqus sequencing, thiab interlocks tiv thaiv cov dej txias tsis ua hauj lwm thiab lub hwj chim anomalies.
Tsawg-Chamber paug paug:
Internal shielding siv electro- polished stainless hlau nrog tshem tau liners kom ceev particulate txo thiab txij nkawm turnaround.
Cov ntaub ntawv zaj duab xis & substrates
Tau tshaj evaporation Materials
Hlau: Au, Ag, Al, Ti, Cr, Ni, Pt, Cu, Mo, W
Dielectric thiab Oxides: SiO2, TiO2, Al2O3, Ta2O5, HfO2, ITO
Hom substrate
Silicon wafers (2 nti rau 12 nti)
Optical iav, fused silica, thiab quartz substrates
Cov yeeb yaj kiab ua tau yooj yim polymer (polyimide, PET ntawm yob- mus rau - yob modules)
Ceramic substrates (Al2O3, AlN)
Daim ntawv thov
Optical Coatings:
Anti-paj (AR) coatings, nqaim-band filters, thiab siab-reflectivity mirrors rau laser thiab photonics systems.
Cov khoom siv semiconductor:
Ohmic kev sib cuag tsim, rooj vag metallization, thiab nqa- tawm kev ua haujlwm rau microelectronics.
Optoelectronics:
Transparent conductive oxide (TCO) khaubncaws sab nraud povtseg thiab nyias zaj duab xis rau OLED zaub thiab photovoltaic hlwb.
Advanced R & D:
Tshawb nrhiav nyias-cov yeeb yaj kiab sib nqus, cov yeeb yaj kiab superconductive, thiab ntau- txheej heterostructures.
Customization & System Configuration
Txhua qhov nyias - zaj duab xis kaw lus raug teeb tsa kom phim cov txheej txheem tshwj xeeb thiab cov txheej txheem tsim khoom. Cov kev hloov kho engineering muaj xws li:
Pumping Stack xaiv:
Turbo-molecular twj (TMP), cryopumps, los yog roj- diffusion configurations haum rau lub hauv paus nqus tsev vacuum thiab throughput.
Load-Kub kev koom ua ke:
Los ntawm txhais tes load-lock lossis automated multi-chamber cluster systems kom tswj tau ultra-lub tshuab nqus tsev siab thiab nce wafer throughput.
Hauv -Situ Metrology:
Integration ports rau spectroscopic ellipsometers, optical monitors, lossis residual gas analyzers (RGA).
Tswj Software:
Proprietary PLC/HMI interface nrog daim ntawv qhia kev cia, cov ntaub ntawv kaw, thiab SECS/GEM kev sib txuas lus raws tu qauv rau kev koom ua ke ntse Hoobkas.
Manufacturing & Quality Control
Vessel Fabrication:
Txhua lub tshuab nqus tsev tau raug kuaj helium mass spectrometer nrog qhov kev tsis lees paub ntawm <1 × 10^-9 Pa·m³ / s.
Weld Integrity:
TIG vuam ua nyob rau hauv inert gas shielding, ua raws li los ntawm sab hauv nto passivation thiab mechanical polishing kom txo tau outgassing.
Factory Txais Kev Xeem (FAT):
72-teev qhuav tas mus li-khiav kev ntsuas ntsuas twj tso kua mis nkhaus, e-phom cheb precision, interlock teb lub sij hawm, thiab thermal stability ua ntej crating.
Ua raws li & Cov Qauv:
Ua tau raws li ISO 9001 kev tswj hwm kev tswj hwm zoo, nrog cov tshuab tsim ua kom tau raws li CE cov lus qhia thiab cuam tshuam rau SEMI (S2 / S8) kev nyab xeeb thiab cov lus qhia ergonomic.
FAQ
Peb paub zoo-paub tias yog ib qho ntawm cov khoom siv hluav taws xob electron evaporation nyias cov khoom lag luam thiab cov muag khoom hauv Suav teb. Yog hais tias koj yuav mus yuav customized electron beam evaporation nyias zaj duab xis khoom ua nyob rau hauv Suav teb, txais tos kom tau txais pricelist los ntawm peb lub hoobkas. Rau nqe kev sab laj, tiv tauj peb.
