Product Overview
Lub Tshuab Cathodic Arc Evaporation System yog kev tsim khoom-qib lub cev vapor deposition (PVD) platform engineered rau depositing hnav-resistant, corrosion{2}}resistant, thiab qis- txhuam tawv tawv. Los ntawm kev ua haujlwm qis-voltage, siab- tam sim no hluav taws xob arcs, cov hom phiaj cathode yog vaporized thiab ionized tam sim ntawd ntawm qhov chaw cathode, tsim cov plasma hlau ionized heev.
Tsim thiab tsim nyob rau hauv ISO 9001 cov qauv kev tswj xyuas zoo thiab CE cov lus qhia ua raws, cov txheej txheem no tau teeb tsa rau siab -thov txheej txheej ua haujlwm hauv cov cuab yeej tsim khoom, cov khoom siv tsheb, thiab kev lag luam kho vajtse. Standard configurations integrate multi-cathode layouts nrog ywj siab sib nqus- teb steering, programmable DC/pulsed bias fais fab mov, thiab automated nqus tsev tswj kom tswj tau raws li cov zaj duab xis stoichiometry thiab ntom microstructures.
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![Arc Evaporation Thin Film System]()
Arc Evaporation Thin Film SystemThe Industrial Cathodic Arc Evaporation Thin Film System is engineered for the high-rate deposition of dense, strongly adherent metallic, alloy, and ceramic compound coatings. Kev khiav hauj lwm...saib ntxiv -
![Arc Evaporation PVD khoom]()
Arc Evaporation PVD khoomKev lag luam cathodic arc evaporation PVD system siv qis-voltage, siab- cov hluav taws xob tam sim no kom vaporize cov khoom cathode lub hom phiaj hauv lub tshuab nqus tsev. Cov txheej txheem no...saib ntxiv -
![Nqus Arc Thin Film System]()
Nqus Arc Thin Film SystemLub Tshuab Nqus Tsev Arc Thin Film System siv cathodic arc evaporation kom tso ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom ntom...saib ntxiv -
![Cathodic Arc Thin Film Khoom siv]()
Cathodic Arc Thin Film Khoom sivLub cev vapor deposition (PVD) system siv hauv zos qis-voltage, siab-tam sim no hluav taws xob arcs kom vaporize cov khoom cathode lub hom phiaj rau hauv cov ntshav ionized tag nrho. Qhov siab...saib ntxiv -
![Arc Evaporation Deposition Khoom]()
Arc Evaporation Deposition KhoomMuaj lub cev vapor deposition (PVD) platform engineered rau siab - tus nqi synthesis ntawm ntom, hnav-resistant, thiab ua hauj lwm nyuaj txheej. Kev txhawb nqa siab -tam sim no, qis-voltage...saib ntxiv -
![Arc Evaporation nyias zaj duab xis khoom]()
Arc Evaporation nyias zaj duab xis khoomQhov no cathodic arc evaporation system vaporizes cov khoom cathode lub hom phiaj ntawm qhov qis -voltage, siab -tam sim no hluav taws xob arc los tsim cov ionized hlau plasma tag nrho. Piv nrog...saib ntxiv
Technical Specifications
|
Parameter |
Specification Range / Standard Configuration |
|
Chamber Dimensions |
Txoj kab uas hla: 800 mm - 1800 mm (Customizable ntsug / kab rov tav layouts) |
|
Chamber Khoom |
Muab ob npaug rau-walled SUS304 stainless hlau nrog dej sab hauv- cov cua txias |
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Qhov kawg nqus siab |
<= 5.0 x 10^-4 Pa (Achieved via roots blower and molecular/oil diffusion pump groups) |
|
Cathode Configuration |
4 mus rau 12 daim duab plaub / voj voog arc qhov chaw nrog electromagnetic kauj |
|
Arc Power Supply |
300A - 500A adjustable tas li tam sim no, ripple<= 2% |
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Substrate Bias Power |
0 mus rau -1000V adjustable, pulsed bias zaus 10 kHz - 100 kHz |
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Cua sov System |
Radiant rhaub array, max kub 600℃+/- 5℃uniformity |
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Workpiece Rotation |
Planetary los yog dual -axis rotation tsav los ntawm magnetic fluid feedthrough |
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Tswj System |
PLC + Muaj PC, daim ntawv qhia -tsav kev tswj xyuas qhov sib lawv liag |
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Cov kev xav tau siv hluav taws xob |
Cov dej txias: 0.25-0.35 MPa, 20-25 degree; Lub hwj chim: 380V / 480V, 3-theem, 50/60 Hz |
Arc evaporation txheej txheem
Lub voj voog deposition ua haujlwm nyob rau hauv cov txheej txheem nruj tswj kom lav tau zaj duab xis kev ncaj ncees thiab kev sib txuas ua ke:
Evacuation & Outgassing:
Lub tshuab nqus tsev vacuum yog pumped mus rau lub hauv paus siab. Substrates yog rhuab nyob rau hauv lub tshuab nqus tsev kom tshem tawm cov volatile nto thiab residual ya raws.
01
Plasma Etching (Tsev):
Hlau ion bombardment (siv titanium los yog chromium lub hom phiaj qhov chaw) ntxuav lub substrate nto ntawm ib tug atomic theem, tshem tawm haiv neeg oxides thiab activating lub interface.
02
Reactive Deposition:
Reactive gases (N2, CH4, O2) raug txhaj rau hauv lub chamber los ntawm huab hwm coj tswj (MFCs) kom hnov mob nrog cov hlau plasma flux (xws li Ti, Cr, AlTi), tsim cov yeeb yaj kiab xws li TiN, TiAlN, lossis CrN.
03
Cua txias & cua:
Tshaj tawm - tso cua txias tshwm sim nyob rau hauv kev tiv thaiv inert pa cua ua ntej chamber venting thiab ib feem retrieval.
04
Txhawb Cathode Lub Hom Phiaj
Titanium (Ti) & Titanium Aluminium (TiAl):Cov ntaub ntawv hauv paus rau tus qauv TiN thiab siab -oxidation- tiv taus TiAlN txheej (nrog oxidation mus txog 900℃).
Chromium (Cr):Siv rau kev kho kom zoo nkauj tiav thiab corrosion- tiv taus CrN/CrC txheej.
Zirconium (Zr) & Titanium Silicon (TiSi):Siv rau kev kho kom zoo nkauj tshwj xeeb thiab hnav hnyav heev- cov yeeb yaj kiab nanocomposite resistant.
Compatible Substrate Materials
Siab -Speed Steel (HSS):Twist xyaum, kawg mills, hobs, thiab broaches.
Cemented Carbides (WC-Co):Indexable inserts, reamers, thiab forming tuag.
Engineering Steels & Alloys:Automotive valve Cheebtsam, lub zog, stainless hlau sanitary hardware, thiab titanium kho mob cog.
Daim ntawv thov & kev ua haujlwm cuam tshuam
Hlau txiav cuab yeej:
Kev tso tawm ntawm TiAlN thiab AlCrN txheej txheej ntawm carbide inserts thiab kawg mills, txuas ntxiv cov cuab yeej lifespan los ntawm 200% mus rau 300% thiab ua kom qhuav siab - ceev machining.
Kev Sau & Stamping Tuag:
Application of dense, low-friction coatings to reduce adhesive wear, galling, and workpiece sticking during deep drawing, reducing downtime by up to 40%.
Automotive Fais Fab:
Kev kho cov piston rings, roj txhaj koob pins, thiab tappets kom txo qis ciam teb kev sib txhuam coefficient mus rau <0.15 thiab tiv thaiv scuffing hnav.
Industrial Hardware & Sanitary Faucet:
Hard hniav PVD txheej (TiN kub, sawv kub, dub zirconium) dhau qhov tsawg kawg nkaus 500-teev nruab nrab ntsev tsuag tshuaj ntsuam (ASTM B117).
Customization & Txheej Txheem Configuration
Cov cuab yeej layouts nplai raws li qhov ntim ntau lawm, ib feem geometry, thiab lub Hoobkas hneev taw:
Chamber Geometry:
Vertical loading qauv rau cov cuab yeej hnyav; kab rov tav batch configurations rau siab - muaj peev xwm fixture loading.
Kev koom ua ke Source:
Hybrid configurations combining cathodic arc qhov chaw nrog unbalanced magnetron sputtering (RMS) cathodes rau deposit smooth, droplet -free multilayer architectures.
Filtration Systems:
Optional magnetic macroparticle filters (steered arc filters) ntsia ntawm cathode channels kom tshem tawm macro-droplets rau kho qhov muag lossis ultra- du precision functional coatings.
Automation Interface:
Kev koom ua ke-npaj rau neeg hlau thauj khoom caj npab thiab automated guided tsheb (AGV) batch staging.
Structure Integrity:Chamber lub cev tau txais Helium huab hwm coj spectrometer xau kuaj ntawm qhov chaw nkag siab ntawm<= 1 x 10^-9 Pa*m3/s prior to assembly.
Hluav Taws Xob Kev Nyab Xeeb & Ua Raws Cai:Ua nruj me ntsis raws li CE thiab IEC cov lus qhia txog kev nyab xeeb hluav taws xob, muaj kev ntsuas kev ntsuas hluav taws xob tag nrho thiab kev cuam tshuam kev nyab xeeb thaum muaj xwm ceev.
Functional Run-off (FAT):Each system undergoes a 72-hour continuous dry-run test and a full-process thermal deposition test in our factory. Coating thickness uniformity (+/- 5%) and adhesion (Scratch Tester critical load Lc >= 40 N / Rockwell indentation HF1-HF2) raug txheeb xyuas ntawm daim coupon xeem ua ntej xa khoom.
Installation & Technical Support
Kev Npaj Qhov Chaw:
Daim duab qhia txog kev siv hluav taws xob tau piav qhia txog cov dej txias ntws, tso pa tawm, lub peev xwm thauj khoom hauv pem teb, thiab cov khoom siv hluav taws xob poob rau 4 lub lis piam tom qab- daim ntawv cog lus.
Ntawm -Site Commissioning:
Factory-cov txheej txheem ntawv pov thawj engineers tswj cov khoom sib dhos, lub tshuab nqus tsev vacuum, kev sib txuas hluav taws xob, thiab kev teeb tsa cov ntawv qhia pib ntawm tus neeg siv khoom.
Txheej Txheem Hloov Hloov:
Kev xa khoom suav nrog cov qauv hauv qab cov zaub mov txawv (TiN, TiAlN, CrN) thiab kev cob qhia ua haujlwm rau kev saib xyuas sab hauv thiab pab pawg engineering.
Chaw Taws Teeb Diagnostic Support:
Cov kab ke nruab nrog kev ruaj ntseg kev lag luam router rooj vag rau tej thaj chaw deb parameter teeb meem thiab PLC logic diagnostics.
FAQ
Peb paub zoo-paub tias yog ib qho ntawm cov ua arc evaporation nyias zaj duab xis khoom manufacturers thiab lwm tus neeg nyob hauv Suav teb. Yog hais tias koj yuav mus yuav customized arc evaporation nyias zaj duab xis khoom ua nyob rau hauv Suav teb, txais tos kom tau txais pricelist los ntawm peb lub hoobkas. Rau nqe kev sab laj, tiv tauj peb.
