Qhov tshwm sim ntawm lub tshuab nqus tsev txheej tshuab tau tsis ntev los no. Hauv kev lag luam thoob ntiaj teb, CVD (tshuaj vapor deposition) thev naus laus zis tau siv rau cov cuab yeej txiav nyuaj rau xyoo 1960. Txawm li cas los xij, thaum lub sij hawm nws txoj kev loj hlob thaum ntxov, lub tshuab no tau ntsib ntau yam teeb meem. Nws yuav tsum tau ua haujlwm nyob rau hauv ib puag ncig siab - qhov kub thiab txias (nrog cov txheej txheem kub siab tshaj 1000ºC) thiab muaj ntau yam txheej txheej, uas txwv nws txoj kev loj hlob zoo heev.
Thaum kawg ntawm xyoo 1970, PVD (lub cev vapor deposition) thev naus laus zis tau tshwm sim, qhib qhov chaw tshiab nyob hauv thaj chaw ntawm lub tshuab nqus tsev. Tsuas yog ob peb xyoos tom qab ntawd, PVD txheej tshuab tau tsim sai heev.
Niaj hnub no, cov thev naus laus zis tshiab xws li PCVD (lub cev tshuaj vapor deposition) thiab MT-CVD (nruab nrab-kub tshuaj vapor deposition) tau tshwm sim hauv lub tshuab nqus tsev txheej tshuab. Ntau yam khoom siv txheej txheej thiab txheej txheem tau nce mus tas li, nthuav qhia qhov kev vam meej thiab ntau haiv neeg.
Nyob rau hauv lub neej yav tom ntej, txoj kev loj hlob ntawm cov cuab yeej txheej technology yuav suav nrog cov ntsiab lus hauv qab no:
(I) Diversification thiab complexity ntawm txheej txheej
ib. Thawj tiam ntawm PVD txheej feem ntau muaj TiN. Raws li lub hauv paus no, ntau yam hlau txheej xws li TiC, TiCN, ZrN, CrN, WC tau tsim ua tiav. Nrog rau kev txhim kho ntxiv ntawm PVD deposition thev naus laus zis, txhuas tau ntxiv rau hauv cov txheej txheem, thiab cov txheej txheem ntau yam hlau alloy xws li TiAIN thiab TiAICN tau tshwm sim. Lawv hnav tsis kam thiab tawv tawv tawv tau txhim kho zoo dua piv rau ib zaug -cov hlau txheej, ua rau lawv siv tau ntawm kev txiav nrawm dua, piv txwv li, txog li 150m / min hauv kev txiav dov.
b. Tom qab ntawd, nws tau dhau los ua ib qho kev tso nyiaj ntau ntau hom txheej txheej ntawm cov cuab yeej txheej los ntawm txheej los txhawb qhov zoo ntawm txhua txheej. Piv txwv li, TiN + TiCN + TiN, TiN + TiALN, TiAIN + WC / C, thiab lwm yam.
c. Nyob rau hauv xyoo tas los no, PVD txheej thev naus laus zis tau ua ib kauj ruam tseem ceeb rau pem hauv ntej. Ntau lub tuam txhab txheej txheej txawv teb chaws tau ua tiav cov txheej txheem pulse txheej thiab pib siv nws. Piv txwv li, P3E (Pulse Enhanced Electron Emission) thev naus laus zis los ntawm Balzers hauv Switzerland thiab HIP_ (High Ion Pulse) thev naus laus zis los ntawm Cemecon hauv Tebchaws Yelemees. Ob lub thev naus laus zis tshiab no ob leeg siv cov tshuab hluav taws xob hluav taws xob los ua kom lub arc evaporation ntawm cov khoom siv. Vim tias cov txheej txheem no ua haujlwm hauv cov pa oxygen, theoretically, cov cuab yeej no tuaj yeem tso cov hlau oxide (xws li Al2O3, ZrO2, Cr2O3, Ta2O5, thiab lwm yam) thiab nws cov coatings. Tam sim no, Al2O3 txheej tau nkag mus rau theem kev sim ua haujlwm, thiab nws ntseeg tau tias nws yuav siv dav rau yav tom ntej.
(II) Daim ntawv thov kev txhim kho ntawm cov txheej txheem ua kom pom tseeb dua
Txhawm rau ua kom tau raws li cov kev xav tau sib txawv, kev txhim kho thiab tsim cov txheej txheem tau dhau los ua hom phiaj. Raws li cov yam ntxwv thiab cov kev xav tau ntawm cov ntawv thov sib txawv xws li drilling, milling, qhuav dov txiav, stamping, thiab sib sib zog nqus kos duab, coatings nrog cov txheeb ze zoo nyob rau hauv cov yam no tau tsim. Los ntawm kev siv zog tas mus li thiab kev sim, kev vam meej tau ua tiav hauv qee thaj chaw, xws li daim ntawv thov TiX (Al:Ti=2}: 1) coatings hauv milling, AICrN coatings siv rau siab -ceev qhuav dov txiav, CrN + TISIN composite coatings thov nyob rau hauv drilling, thiab TIN + TCX composite coatings. Lawv lub neej muaj txiaj ntsig zoo dua li lwm cov txheej txheem. Tsis tas li ntawd, ntau lub hom phiaj txheej nrog kev ua haujlwm xws li kev tiv thaiv corrosion (Crx coatings), "tus kheej- lubrication (WC/C coatings), ua cov ntaub ntawv mos (MoS2 coatings), thiab ua cov ntaub ntawv nyuaj (CBN, Pob zeb diamond coatings)" twb tau dav siv. Txawm hais tias cov txheej txheem no tau ua tiav zoo hauv lawv cov haujlwm, nrog rau kev txhim kho txuas ntxiv ntawm PVD txheej txheej txheej txheem, cov txheej txheem tshiab yuav raug tsim los txuas ntxiv los hloov cov txheej txheem uas twb muaj lawm.
(III) Lub deposition particles ntawm coatings zoo li yuav nanometerized
Nrog rau kev txhim kho nanotechnology thiab kev nce qib ntawm txheej txheej txheej txheem, nanometer-coated txiav cov cuab yeej tau nyiam cov neeg tshawb nrhiav thiab PVD txheej cov tuam txhab pabcuam. Lub nanometerization ntawm txheej deposition hais tuaj yeem txhim kho lub zog ntawm kev sib txuas ntawm cov txheej thiab substrate nrog rau cov txheej txheem sib txawv, thiab tuaj yeem txo qhov roughness ntawm txheej. Tam sim no, cov deposition hais ntawm feem ntau coatings yog tseem loj. Txawm hais tias muaj qee cov txheej txheej hu ua nano- theem, cov khoom loj tseem tuaj yeem pom nyob rau ntawm qhov kawg ntawm txheej txheej, thiab cov txheej txheej tseem yog qhov ntxhib. Txo qhov luaj li cas ntawm cov txheej txheej deposition hais thaum tswj cov txheej txheem stability kom tsis txhob muaj cov tsos ntawm loj txawv txav yuav dhau los ua ib qho tseem ceeb kev taw qhia rau txoj kev loj hlob ntawm coatings, tshwj xeeb tshaj yog nyob rau hauv daim iav saum npoo daim ntaub ntawv. Txawm hais tias qee lub tuam txhab tau tsim cov iav nto txheej, lawv qhov zoo thiab kev ruaj ntseg tsis zoo, thiab cov txheej txheem kuj tseem nyuaj. Nyob rau hauv lub neej yav tom ntej txheej kev tshawb fawb thiab kev loj hlob, nanometerization ntawm txheej hais thiab nanometerization ntawm interlayer thickness ntawm coatings yuav yog lub ntsiab txoj kev loj hlob cov lus qhia, uas yog ib qho tseem ceeb heev rau kev txhim kho cov kev ua tau zoo ntawm coatings thiab txo interlayer kev nyuaj siab, thiab yuav ntxiv txhim kho lub smoothness ntawm daim iav nto, yog li ntxiv expanding daim ntawv thov ntawm txheej kev lag luam.
(IV) Cov txheej txheem kub ntawm cov txheej txheej tau qis dua
Los ntawm qhov ntsuas kub ntawm li 1000℃rau cov txheej txheem CVD txog li 500℃rau PVD thiab PECVD txheej, qhov kub ntawm cov txheej txheej tau txo qis, yog li nthuav dav daim ntawv thov ntau yam txheej txheej. Txawm li cas los xij, qhov ntsuas kub ntawm li 500℃tseem muaj qhov cuam tshuam tsis zoo rau cov txheej txheem ua haujlwm, xws li ua rau deformation ntawm lub workpiece thiab txo qis hardness ntawm lub substrate. Yog li ntawd, cov kev cai tshwj xeeb rau preheating ntawm txheej txheej workpiece yuav tsum tau npaj, xws li cov cua kub rov qab ntawm lub workpiece tsis yog qis dua lub txheej kub. Cov txheej txheej nrog cov kub qis, xws li cov txheej txheej kub qis dua 200 degree, yuav tshem tawm cov kev txwv no, tso cai rau ntau yam khoom siv rau txheej txheej, xaiv cov txheej txheem ua ntej ua kom yooj yim dua, thiab ua tiav daim ntawv thov sib txawv ntawm cov txheej txheem hloov kho. Nyob rau tib lub sijhawm, kev siv cov txheej txheem qis - kub yuav txo tau lub zog siv ntawm cov khoom siv txheej txheej, muaj qee yam kev tiv thaiv ib puag ncig hauv kev txuag hluav taws xob. Tsis tas li ntawd, qhov txo qis ntawm txheej txheej tso cai rau lub sijhawm cua sov thiab lub sijhawm txias, ua kom lub sijhawm xa khoom ntawm cov txheej txheej thiab txhim kho kev ua haujlwm. Yog li ntawd, qis- cov txheej kub kub yuav txhawb nqa cov ntawv thov thiab ua kom nrov ntawm cov txheej txheem, thiab yuav dhau los ua ib qho tseem ceeb rau kev txhim kho PVD txheej.
