EBE-V600 series yog kev lag luam- nplai lub cev vapor deposition (PVD) platform tsim los rau cov nyias nyias- zaj duab xis txheej ntawm cov khoom siv kho qhov muag, cov khoom siv semiconductor, thiab cov khoom siv siab heev. Los ntawm kev coj lub siab - zog, magnetically tsom electron beam mus rau cov khoom siv hauv dej-cov crucibles txias, lub kaw lus ua tiav cov evaporation ceev ceev thaum khaws cov thermal loads cais tawm ntawm cov phab ntsa chamber.
Cov qauv tsim suav nrog ntau- hnab tshos electron qhov chaw thiab dual quartz siv lead ua microbalance (QCM) sensors, kom ntseeg tau tias stoichiometric zaj duab xis fidelity thiab zoo ib yam thickness tswj nyob rau hauv multi- txheej dielectric los yog hlau pawg.
Technical Specifications
|
Technical Parameter |
Specification nqi |
|
Chamber Geometry & Khoom siv |
Φ600 hli x 600 hli cylindrical hlab ntsha; SS304 electropolished sab hauv nrog sab nraud cov dej txias |
|
Qhov kawg Base Siab |
<= 5.0 x 10^-5 Pa (achieved via 12-hour bake-out and high-vacuum pumping) |
|
Pump-Cycle Time |
<= 15 minutes (From atmosphere to 1.0 x 10^-3 Pa) |
|
Hluav Taws Xob Hluav Taws Xob |
6 kW txog 12 kW multi-pocket configuration nrog 270℃beam deflection |
|
Crucible Hearth Peev Xwm |
4 mus rau 6 hnab ris (Kev hloov pauv tau tooj liab / graphite crucibles, 15cc txog 40cc ntim ib lub hnab) |
|
Substrate theem rotation |
0 mus rau 30 RPM hloov pauv ceev planetary lossis tsav ncaj qha |
|
Substrate Cua sov Range |
Ambient mus rau 600℃ntawm PID kaw -loop halogen teeb array |
|
Thickness saib xyuas |
Dual QCM sensors nrog tsis siv neeg kaw lus tawm tswv yim tswj |
Ntsiab nta
270℃Sib nqus Deflection E- Phom:cais cov tungsten filament los ntawm txoj kev vapor ncaj qha, tiv thaiv luv luv -circuiting thiab txuas lub neej ua haujlwm ntawm lub sijhawm txij nkawm.
Digital Sweep Control:Programmable raster qauv faib hluav taws xob hluav taws xob sib npaug thoob plaws qhov chaw evaporant, txo qhov tsim ntawm pinhole thiab nyiam evaporation thaum lub sij hawm alloy deposition.
Decoupled Vacuum Architecture:Roughing thiab siab - lub tshuab nqus tsev cov kab yog cov txheej txheem cais los ntawm lub ntsiab chamber ncej kom txwv tsis pub cov neeg kho tshuab kev co hloov thaum lub sij hawm ua yeeb yaj kiab.
Hardware Interlock Safety Matrix:Tiag -lub sijhawm PLC saib xyuas cov dej txias, siab -voltage tawm tswv yim, pneumatic siab, thiab qhov rooj foob kev ncaj ncees.
Nqus System Configuration
Lub tshuab nqus tsev sub-circuit yog tsim los rau kev caij tsheb kauj vab thiab lub hauv paus siab kom txo qis cov roj seem (H2O, O2, N2) hauv cov yeeb yaj kiab loj:
Siab -Nqus Pump:1200 L/s turbo-molecular twj tso kua mis rov qab los ntawm dual-theem rotary vane twj tso kua mis (los yog qhuav scroll twj tso kua mis configuration rau cleanroom ua raws).
Lub vaus kaw:Pneumatically actuated siab -kev coj ua rooj vag valve cais lub chamber thaum lub sijhawm ua haujlwm.
Lub tshuab nqus tsev ntsuas:Ua ke Pirani thiab Cold Cathode ionization gauges npog tas li ntawm huab cua mus txog 10^-6 Pa.
Cov ntaub ntawv zaj duab xis & substrates
Compatible Evaporant Sources
Oxide thiab Dielectrics:SiO2, TiO2, Ta2O5, Al2O3, HfO2
Pure Hlau:Au, Ag, Al, Ti, Cr, Pt, Ni
Semiconductors & Conductors:Si, Ge, ITO (Indium Tin Oxide)
Daim ntawv thov
Optical Interference Filters:Siab-index thiab qis-index ntau- txheej txheej txheej tso rau nqaim-band hla cov lim dej thiab cov iav laser.
Semiconductor Device Fabrication:Ohmic kev sib cuag tsim, rooj vag oxide deposition, thiab hlau cov noob txheej.
OLED & Display Research:Nyias metallic cathode deposition thiab ntau- txheej organic/inorganic passivation xeem.
Hard Refractory Coatings:Kev tiv thaiv hnav- cov khaubncaws sab nraud povtseg rau cov khoom siv tshuab thiab aerospace.
Kev kho kom haum
Chamber Expansion:Extended nkoj heights los yog duab geometries tailored rau pawg cuab yeej kev koom ua ke.
Kev koom ua ke Source:Concurrent thermal evaporation qhov chaw (cov nkoj tiv taus) ua ke nrog cov phom hluav taws xob hluav taws xob.
Ion{0}}Assisted Deposition (IAD):Kev sib koom ua ke ntawm qhov kawg -Hall lossis Kaufman ion qhov chaw rau kev ua yeeb yaj kiab kom nrawm thiab kho qhov kev ntxhov siab.
Software Architecture:PLC / HMI daim ntawv qhia kev ua haujlwm raws li Siemens S7 lossis Beckhoff automation moj khaum.
Kev Tswj Xyuas Zoo
Mass Spectrometer Helium Leak Testing:Txhua chamber weldment raug sim rau qhov tsis lees paub qhov pib ntawm <1 x 10^-9 Pa·m3/s ua ntej kev koom ua ke.
Hluav taws xob ua raws:High -voltage dielectric tiv thaiv kev sim thiab kev txheeb xyuas txuas ntxiv hauv av raws li CE / UL cov lus qhia.
Factory Txais Kev Xeem (FAT):72-teev qhuav tas li-khiav kev ntsuas ntsuas lub hauv paus siab nkhaus, e-nqaj cheb rov ua dua, thiab lub sijhawm teb sib cuam tshuam. Test cov ntaub ntawv xa nrog lub tsev.
Installation & Technical Support
Site Commissioning:Factory-cov kws tshaj lij tau ntawv pov thawj tswj cov khoom sib dhos, kev kuaj xyuas lub tshuab nqus tsev, kev saib xyuas kev sib txuas hluav taws xob, thiab kev ua haujlwm pib ua haujlwm.
Kev cob qhia txuj ci:3-hnub nyob rau ntawm qhov chaw ua haujlwm thiab kev saib xyuas raws tu qauv qhia txog kev hloov filament, lub tshuab nqus tsev vacuum rebuilding, thiab daim ntawv qhia kev kho.
Cov ntaub ntawv xa tuaj:Ua kom tiav cov ntaub ntawv sib txuas nrog rau P&ID schematics, daim duab kab hluav taws xob, PLC cov ntaub ntawv thaub qab, thiab cov khoom seem seem.
Cov lus nug nquag
Q: Lub neej ua haujlwm ntawm e- phom tungsten filament yog dab tsi, thiab nws ua haujlwm li cas?
A: Raws li tus qauv kev ua haujlwm siab (<= 10^-4 Pa) and clean source materials, filament lifespan averages 30 to 50 operational hours. A quick-access vacuum flange allows cartridge exchange within 20 minutes without venting the entire manifold.
Q: Yuav ua li cas lub kaw lus tiv thaiv spitting thaum oxide deposition?
A: Lub tshuab hluav taws xob digital cheb faib hluav taws xob hluav taws xob hla ib qho kev ntsuas raster matrix ntawm oxide pellet. Qhov no tshem tawm cov cua sov hauv ib cheeb tsam, tiv thaiv tawg tawg, thiab suppresses micro-tej ejection.
Q: Cov khoom siv hluav taws xob twg yog qhov yuav tsum tau ua ntawm qhov chaw teeb tsa?
A: Cooling Water: Supply pressure 0.25 MPa to 0.4 MPa, flow rate >= 30 L/min, kub 18℃txog 25℃.
Daim phiaj hluav taws xob: 3-theem, 380V ± 10%, 50/60 Hz (los yog lub Hoobkas teeb tsa rau cov qauv hauv cheeb tsam).
Compressed Cua: 0.5 MPa rau 0.7 MPa cua qhuav rau pneumatic valve actuators.
Q: Puas yog cov chaw taws teeb txheeb xyuas kev nkag mus rau hauv qhov kev tswj hwm?
A: Yog. Ib qho chaw nres nkoj Ethernet txhawb kev ruaj ntseg VPN kev sib txuas rau tej thaj chaw deb PLC log retrieval thiab software teeb meem los ntawm peb pab neeg engineering.
Cim npe nrov: Tuam Tshoj electron beam evaporation nyias zaj duab xis khoom, Tuam Tshoj electron beam evaporation nyias zaj duab xis manufacturers, lwm tus neeg, Hoobkas
