Ion{0}}Assisted Evaporation Thin Film System

Lub Ion-Assisted Evaporation (IAE) Thin Film System integrates lub cev vapor deposition (PVD) nrog lub zog ion beam bombardment. Thaum lub sij hawm thermal los yog electron -beam evaporation, ib qho auxiliary Kaufman los yog End-Hall ion qhov chaw directs argon los yog reactive gas ions mus rau lub substrate loj hlob. Qhov kev hloov pauv lub zog no txhim kho adatom kev txav mus los, tshem tawm cov qhov khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob khoob

Tsim los rau kev tsim khoom thiab kev tshawb fawb ib puag ncig uas xav tau kev tswj xyuas nruj ntawm qhov chaw kho qhov muag thiab cov kev ntxhov siab nyob ib puag ncig, qhov system no haum rau ntau- hnab tshos electron beam phom, tiv thaiv evaporators, thiab kho kom haum rau substrate fixtures.

Tiag -Lub Sijhawm Ion Momentum Hloov:Ion-pab foob pob tawg ua kom cov microstructures, suppressing ib puag ncig noo noo nqus thiab refractive index hloov. Hla -sectional SEM tsom xam xyuas xoom columnar void tsim nyob rau hauv oxide pawg.

Kaw-Txoj Cai Loop Rate:PID- tswj cov khoom siv hluav taws xob sib txuas ncaj qha nrog ntau-channel Quartz Crystal Microbalance (QCM) sensors kom tswj tau qhov kev tso nyiaj ruaj khov hauv +/- 0.1 Å/s.

Tsawg Defect Thermal Management:Radiation heater assemblies pab substrate ua ntej - ntxuav thiab hauv -situ annealing mus txog 400℃nrog +/- 2.5℃uniformity.

Rapid-Turnaround Maintenance:Ceev- nkag mus rau qhov chaw flanges thiab modular ion- cov kab sib txuas ua ke ua kom tiav kev saib xyuas sab hauv thiab lub hom phiaj rov ua dua nyob rau hauv qis dua 2 teev, txo qis qhov tsis tau teem caij ua kom huv si.

Pumping stack:Rov qab twj tso kua mis (Cov hauv paus + rotary vane) ua ke nrog siab -throughput turbomolecular twj (1600 L / s muaj peev xwm) los yog cryopumps (1500 L / s) engineered los lis reactive gas loads thaum lub sij hawm siab - cov txheej txheem IAE.

Valve & Sealing:Pneumatic lub rooj vag li qub thiab Viton / hlau dual- foob cais cov txheej txheem chamber los ntawm roughing kab, tiv thaiv hydrocarbon backstreaming.

Siab Interlocks:Automated PLC sequencing monitors foreline pressure, cooling water flow rate, and compressed air supply before the high -voltage E-beam gun activation.

Cov khoom siv evaporation:Oxides (TiO2, ZrO2, SiO2, Al2O3), fluorides (MgF2), thiab siab- purity hlau (Au, Ag, Al, Ti).

Cov khoom siv substrate:Optical iav (BK7, fused silica), silicon wafers (txog 300 hli), compound semiconductors (GaAs, InP), thiab ceramics / hlau.

Fixturing:Kev cai -machined aluminium lossis stainless hlau substrate tuav tau tsim los rau thermal conductivity thiab me me particle tiam thaum lub sij hawm planetary rotation.

Series -O (Precision Optics):Optimized rau ntau- txheej txheej kho qhov muag cuam tshuam cov ntxaij lim dej, tsom iav laser, thiab AR txheej. Kev koom ua ke nrog broadband kho qhov muag saib xyuas (OMS) thiab siab - qhov ceev ntawm lub ntiaj teb kev sib hloov los xyuas kom meej spectral hloov <0.1% nyob rau hauv ambient humidity hloov.

Series -S (Semiconductor Ntim & Sensors):Engineered rau qis- kub hlau cov noob txheej thiab dielectric passivation ntawm 200mm / 300mm silicon wafers nrog particle-free load-lock compatibility.

Series-R (R&D / Advanced Materials Research):Cov chav tsev hloov tau yooj yim heev uas txhawb nqa ob qhov chaw ion thiab qhov chaw ceev ceev - lawj kev sib hloov rau cov tsev kawm qib siab hauv tsev kawm qib siab thiab cov chaw R&D koom nrog.

Chamber Dimensions:Kev cai sab hauv ntim li ntawm 600 hli mus rau 1200 hli txoj kab uas hla.

Automation Qib:Semi- tsis siv neeg PLC cov zaub mov txawv lossis cov zaub mov tsis muaj neeg saib xyuas tag nrho tswj los ntawm kev ua lag luam kov-screen SCADA software nrog Audit Trail (21 CFR Part 11 raws li kev xaiv muaj rau kev kho mob / sensor ntau lawm).

Diagnostic Ports:Ntxiv NW/CF flanges faib rau hauv -situ spectroscopic ellipsometry lossis residual gas analyzers (RGA).

Leak Detection:Txhua lub tshuab nqus tsev nkag mus rau helium huab hwm coj spectrometer xau kuaj mus rau qhov pib ntawm <1 x 10^-10 Pa * m^3 / s ua ntej lub Hoobkas tso tawm.

Microstructural Validation:Standard QA includes optional cross-sectional SEM sample inspection to verify film density and structural uniformity.

Kev Nyab Xeeb Hluav Taws Xob:High -voltage rwb thaiv tsev tsis kam, grounding continuity, thiab interlock teb testing ua raws li CE/SEMI S2 qauv.

Factory Txais Kev Xeem (FAT):Ua tiav ntawm peb qhov chaw tsim khoom; Cov neeg siv khoom tau txais cov ntaub ntawv qhia txog kev ua haujlwm hauv lub hauv paus kom paub tseeb tias lub hauv paus siab, deposition tus nqi stability, thiab ion tam sim no tso zis.

Kev Xeem Txais Qhov Chaw (SAT):Ntawm - cov kws tsim khoom hauv chaw saib xyuas cov khoom siv hluav taws xob, cov khoom siv hluav taws xob sib txuas (cov dej txias, lub zog, cov cua compressed, cov txheej txheem gases), thiab calibration khiav.

Cov ntaub ntawv:Cov ntawv qhia kev pabcuam muaj xws li hluav taws xob schematics, PLC qhov chaw logic cim npe, lub tshuab nqus tsev vacuum, thiab cov npe khoom siv.