Kev lag luam- qib nqus txheej txheej ua ke nrog magnetron sputtering (RF/DC/HiPIMS) thiab cathodic arc evaporation. Tsim los ua ntu zus, ntau- txheej, hlau, thiab nano- sib xyaw nyias- zaj duab xis tso tawm ntawm qhov ntsuas ntau lawm.
Technical Specifications
|
Parameter |
Specification nqi |
|
Qhov kawg nqus siab |
<= 5.0 x 10^-4 Pa (Turbo-molecular and roots-rotary pump configuration) |
|
Chamber Dimensions |
Customized sizing los ntawm D 600 mm x 600 mm rau D 1500 mm x 1500 mm (304/316L electro- polished stainless hlau) |
|
Deposition Sources |
Configurable: 2-6 magnetron sputtering cathodes / 2-4 qhov chaw arc |
|
Substrate Bias Power |
0 mus rau -1000 VDC adjustable (pulsed DC rau dielectric substrates) |
|
Zaj duab xis Thickness Uniformity |
<= +/- 3% across standard planar holder (via dynamic planetary rotation) |
|
Substrate kub |
Ambient rau 650℃(+/- 2℃PID kaw-loop tswj) |
|
Fais fab faib |
RF (13.56 MHz), DC, Pulsed DC, thiab Mid -Frequency (MF) nrog arc suppression |
Ntsiab nta
Dual{0}}Technology kev koom ua ke:Ua ke sputtering (nqus, amorphous compound films) thiab cathodic arc (siab-ionization hlau / alloy deposition) nyob rau hauv ib lub twj tso kua mis-down voj voog.
Kaw-Loop Gas Management:Mass Flow Controllers (MFCs) ua ke nrog kho qhov muag emission saib xyuas (OEM) stabilize reactive gas ib nrab siab.
Mechanical Isolation:Multi-axis planetary drives cais cov neeg kho tshuab bearings los ntawm cov txheej txheem cheeb tsam, tiv thaiv cov khoom paug.
Thermal Architecture:Muab ob npaug rau- phab ntsa dej- cov phab ntsa txias chamber thiab tiv thaiv hluav taws xob tiv thaiv thermal distortion thaum lub sijhawm siab - lub zog ua haujlwm.
Automation Core:Siemens S7-1500 PLC thiab WinCC SCADA architecture rau kev cuam tshuam ntawm lub sijhawm, roj, thiab kev saib xyuas lub zog.
Nqus System Configuration
Roughing Tsheb ciav hlau:Direct-tsav cov twj tso kua mis tig rov qab los ntawm cov hauv paus hniav tshuab nrog cov kua nplaum sib nqus.
Lub tshuab nqus tsev siab:Magnetically levitated turbo- cov twj molecular (1200 - 3200 L/s) lossis cryogenic twj.
Kev kuaj mob:Integrated Helium mass spectrometer test ports thiab automated sequencing interlocks.
Khoom siv & Substrate Compatibility
Cov ntaub ntawv hom phiaj:
Hlau:Ti, Cr, Al, Zr, Cu, TiAl, CrAl, Si
Ceramics / Compounds:TiN, CrN, TiAlN, DLC, Al2O3, SiO2
Substrates:Cov cuab yeej hlau (H13, M2, carbide inserts), Titanium / Aluminium structural alloys, engineering ceramics, thiab silicon wafers.
Kev siv & pov thawj kev ua tau zoo
Cov cuab yeej txiav:Tsawg-kev sib txhuam, siab-hardness ntau- txheej txheej (TiAlN/TiN) rau kev siv lub neej ntev nyob rau hauv qhuav siab- ceev machining.
Automotive:Hnav thiab tiv thaiv -scuffing coatings rau piston rings thiab roj txhaj koob pins.
Aerospace:Oxidation-tiv thaiv thermal barrier thiab tiv thaiv zaj duab xis ntawm compressor hniav thiab fasteners.
Optics & Electronics:Conductive pob tshab oxides (ITO) thiab cov ntxaij lim dej kho qhov muag.
Customization Options
Chamber Geometry:Rectangular box configurations rau batch khib loading los yog cylindrical inline geometries.
Tau qhov twg los Retrofitting:Interchangeable cathode mounting flanges rau teb hloov mus rau CFUBMS.
Plasma Etching:Kaufmann- hom phom ion lossis hollow cathode qhov chaw rau hauv -situ substrate tu.
Kev Tswj Xyuas Zoo & Kev Xeem Lub Hoobkas
Vacuum Integrity:Helium leak test pib<= 1 x 10^-9 Pa*m^3/s.
Nto tiav:Chamber internal welds electro- polished rau Ra<= 0.4 um.
FAT:72- teev nruam qhuav-khiav ntawm lub tshuab nqus tsev, kev txav chaw, thiab kev ruaj ntseg interlock loops ua ntej crating.
Kev Ua Raws Cai:Ua rau CE cov lus qhia kev siv tshuab thiab ISO 9001 tus qauv. (Trust Badge Icons: ISO 9001, CE, UL)
Installation & Technical Support
Documentation Bundle:P&ID schematics, hluav taws xob thaiv daim duab, PLC qhov chaw logic, thiab CE / UL cov ntaub ntawv ua raws.
Kev Ua Haujlwm:Field engineers saib xyuas txhua qhov chaw, kev siv hluav taws xob sib txuas, thiab kev txheeb xyuas cov dej xau.
SAT & Daim Ntawv Qhia Kev Qhia:Hauv - qhov kev sim ntsuas qhov chaw pib thiab kev ua kom zoo ntawm daim ntawv qhia.
FAQ
Q: Dab tsi yog lub twj tso kua mis - lub sij hawm qis rau lub hauv paus siab?
A: ncav <5.0 x 10^-4 Pa li ntawm 45 feeb nyob rau hauv huv si, qhuav, thiab ambient thermal tej yam kev mob.
Q: Lub kaw lus puas tuaj yeem hloov pauv ntawm DC thiab RF sputtering nruab nrab - txheej txheem?
A: Yog. Lub hwj chim matrix tso cai rau software- tswj kev sib txuas ntawm DC, pulsed DC, thiab RF yam tsis muaj lub tshuab nqus tsev tawg.
Q: Cov khoom siv hluav taws xob dab tsi yuav tsum muaj ntawm -site?
A: Chilled dej (15 mus rau 20℃ntawm 0.3 mus rau 0.4 MPa), compressed cua (0.6 MPa), siab - purity txheej txheem gases (Ar, N2, O2 ntawm 99.999%), thiab mob siab rau 3-theem industrial zog.
Q: Yuav ua li cas substrate kub tswj thaum lub sij hawm deposition?
A: Integrated infrared pyrometers ua ke nrog radiant heater banks thiab PID kaw -loop tswj.
Cim npe nrov: Tuam Tshoj pvd nyias zaj duab xis system manufacturers, lwm tus neeg, Hoobkas
