Qhov no cathodic arc evaporation system vaporizes cov khoom cathode lub hom phiaj ntawm qhov qis -voltage, siab -tam sim no hluav taws xob arc los tsim cov ionized hlau plasma tag nrho. Piv nrog rau cov txheej txheem thermal evaporation lossis magnetron sputtering, PVD txheej txheem no muab cov ntshav plasma ntau dua thiab cov yeeb yaj kiab zoo tshaj - rau - substrate adhesion, tailored rau kev ua haujlwm, hnav- tiv taus, thiab cov xim tawv tawv.
Technical Specifications
|
Parameter |
Specification Range / Tus nqi |
|
Chamber Dimensions |
Kev cai cylindrical / thawv configurations (Standard: Φ600mm x 600mm txog 1200mm x 1200mm) |
|
Qhov kawg nqus siab |
<= 5.0 x 10^-4 Pa (Turbo-molecular and rotary vane/roots pump suite) |
|
Pump- Lub Sijhawm Ntsig |
Atmospheric rau 8.0 x 10^-3 Pa in<= 15 minutes (Dry, clean, empty chamber) |
|
Arc Power Supplies |
Pulsed thiab DC generators (tso zis: 0 - 200A adjustable, ripple<= 1%) |
|
Cathode Sources |
2 mus rau 6 sib nqus- lim los yog qauv voj voog / lub kaum sab xis arc qhov chaw |
|
Substrate Bias Voltage |
0 - -1000V DC/Pulsed bias (Frequency: 10 - 100 kHz) |
|
Substrate Rotation |
Planetary los yog ib zaug -axis rotation mechanism (1 - 15 RPM) nrog dej / hluav taws xob feedthroughs |
|
Kev Tswj Xyuas Kev Ua Haujlwm |
PLC + Muaj PC nrog kev ua tiav daim ntawv qhia ua haujlwm thiab phau ntawv sib cuam tshuam overrides |
Ntsiab nta
Magnetic Filtered Sources:Internal sib nqus ducts deflect unionized microdroplets deb ntawm lub vapor flux, kom ntseeg tau tias qhov tsawg ntawm qhov roughness (Ra) rau precision qhov chaw.
Kaw-Loop Bias Control: Synchronized pulsed bias regulation manages ion bombardment energy dynamically, relieving residual internal stress in thick ceramic coatings (>10 awm).
High ionization tus nqi:Plasma ionization efficiency nce mus txog 40% - 80%, tsav cov tshuaj sib xyaw ua ke yam tsis muaj xov tooj cua sab nraud.
Modular Chamber Tsim:Fabricated los ntawm 304/316L stainless hlau nrog electro- polished sab hauv (Ra<= 0.4 um), minimizing outgassing and vacuum cycle times.
Nqus System Configuration
Roughing & Roots Pumps:Dual-theem rotary vane twj tso kua mis ua ke nrog cov tshuab ua kom lub tshuab ua kom muaj zog ua haujlwm pib roughing thiab siab roj loads thaum lub sij hawm reactive N2 los yog C2H2 txhaj.
High Vacuum Pumps:Sib nqus levitation turbo- cov twj molecular (1200 - 3200 L / s) tswj cov twj tso kua mis siab rau cov dej vapor seem thiab lub teeb roj.
Valves & Gauging:Pneumatic lub rooj vag li qub, ISO/CF siab- lub tshuab nqus tsev vacuum flanges, thiab ua ke Pirani / kub-cathode ionization gauges koom ncaj qha rau hauv PLC interlock voj.
Khoom siv & Substrate Compatibility
Tau tshaj Cathode Targets
Pure Hlau:Ti, Cr, Al, Zr, Cu, Ni, Ag, Mo, W
Alloys & Compounds:TiAl, CrAl, TiSi, WC, graphite lub hom phiaj rau pob zeb diamond -zoo li carbon (DLC) deposition
Cov khoom siv substrate
Hard Metals & Carbides:Cemented carbides (WC-Co), siab-ceev steel (HSS), stainless hlau txiav inserts
Semiconductors & Ceramics:Silicon wafers, alumina (Al2O3), engineering technical ceramics
Daim ntawv thov
Cov cuab yeej txiav & Tuag:TiN, TiAlN, thiab CrN deposition ntawm drills, kawg mills, thiab stamping tuag kom nce nto hardness rau 2500 - 3500 HV thiab txo kev sib txhuam.
Automotive Cheebtsam:Hnav-tiv taus thiab qis- cov khaubncaws sab nraud povtseg ntawm piston rings, injector pins, thiab iav hniav.
Hniav Hard Coatings:PVD xim coatings (kub, sawv kub, gunmetal, dub titanium) rau kho vajtse thiab cov neeg siv khoom electronics vaj tse.
Functional Thin Films:Conductive thiab barrier txheej rau microelectronics thiab semiconductor ntim.
Kev kho kom haum
Chamber Loj:Scaled ntim variations txuam ib batch geometries thiab ntau lawm hneev taw.
Qhov chaw Hybridization:Multi-cathode kev sib koom ua ke ua ke nrog cathodic arc qhov chaw nrog tsis sib npaug magnetron sputtering (UBMS) cathodes rau gradient multi-layer films.
Substrate Fixturing:Kev cai planetary jigs, localized cua sov arrays mus txog 600 degree, thiab customized zog feedthroughs.
Software Integration:Kev cai PLC daim ntawv qhia logic, SCADA cov ntaub ntawv kaw lus, thiab kev ua raws li kev lag luam.
Kev Tswj Xyuas Zoo
Leak Detection:Helium huab hwm coj spectrometer ntsuam xyuas ntawm tag nrho cov chamber thiab weld seams, guaranteeing ib tug tag nrho cov xau tus nqi ntawm<= 1.0 x 10^-9 Pa·m^3/s.
Hluav taws xob soj ntsuam kev nyab xeeb:Siab - muaj peev xwm dielectric tiv thaiv kev sim, kev kuaj xyuas txuas ntxiv hauv av, thiab kev txheeb xyuas cov lus teb cuam tshuam ua ntej crating.
Khoom siv Traceability:Cov ntaub ntawv ntsuam xyuas cov ntaub ntawv (MTRs) muab rau cov qauv stainless hlau, lub tshuab nqus tsev vacuum, thiab siab -voltage insulation Cheebtsam.
Ua ntej -Shipment Trial Run:72- teev tas mus li qhuav-khiav ntawm lub twj tso kua mis, kev sib hloov tsav, thiab cov khoom siv hluav taws xob nyob rau hauv simulated cycles.
Installation & Technical Support
Phau Ntawv Qhia Kev Npaj Qhov Chaw:Utilities documentation covering floor load limits, cooling water flow rates (>15 m^3/h ntawm 20 - 25 degree), tshem tawm tawm, thiab hluav taws xob poob (380V / 480V, 3-theem, 50/60Hz).
Commissioning & Txais:Factory Txais Kev Xeem (FAT) ntawm peb qhov chaw; Site Txais Kev Xeem (SAT) thiab cov txheej txheem xa mus ua tiav ntawm -qhov chaw los ntawm cov neeg ua haujlwm nyob hauv.
Kev them nyiaj yug Lifecycle:Kev ruaj ntseg VPN tej thaj chaw deb kuaj mob, cov khoom seem ntawm cov khoom lag luam (cov hom phiaj, cov ntaub thaiv npog, cov ntsaws ruaj ruaj), thiab kev cob qhia cov kws kho mob hauv zos.
FAQ
Q: Yuav ua li cas lub kaw lus txo qis (macroparticle) tsim nyob rau hauv arc evaporation?
A: Lub kaw lus siv cov khoom sib nqus lim cathodic arc (magnetic steering thiab duct filtering). Qhov no khoov cov plasma kwj thaum ntxiab microdroplets ntawm sab hauv baffles, yielding ib tug du, droplet -dawb zaj duab xis morphology.
Q: Dab tsi yog qhov kub ntawm lub substrate thaum lub sij hawm deposition, thiab yuav tswj cov cua sov li cas?
A: Kev ua haujlwm kub ntawm 150℃txog 500 degree. Integrated radiation heaters thiab kaw -loop dej- cov channel txias hauv substrate tuav tiv thaiv thermal distortion ntawm cov khoom rhiab.
Q: Cov khoom puas tuaj yeem ua haujlwm tsis tu ncua ntau lawm?
A: Yog. Lub PLC architecture automates twj tso kua mis-down, lub hom phiaj txias, arc ignition, reactive gas tswj los ntawm huab hwm coj flow controllers (MFCs), thiab venting sequences hla ntau -batch khiav.
Q: Yam khoom siv hluav taws xob twg yuav tsum tau npaj rau ntawm -qhov chaw ua ntej xa khoom?
A: Cov kev xav tau muaj xws li cov dej txias txias, cov cua compressed (0.6 - 0.8 MPa) rau pneumatic li qub, hluav taws xob hluav taws xob pub khoom sib txuam nrog lub cev load (60 - 120 kVA), thiab tswj cov txheej txheem roj (Argon, Nitrogen, Acetylene).
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