Muaj Ion{0}}Assisted Thin Film Deposition System
Lub Ion-Assisted Thin Film Deposition System koom ua ke ntau- hnab tshos electron-beam/thermal evaporation nrog rau siab-kev ua tau zoo kawg-Hall lossis Kaufman- hom ion qhov chaw. Thaum lub sij hawm lub cev vapor deposition (PVD), lub zog ion bombardment hloov lub zog ncaj qha mus rau adatoms ntawm lub substrate nto, tshem tawm columnar microstructure voids thiab ua high - ntom, ib puag ncig ruaj khov nyias zaj duab xis.
Engineered rau precision optics fabrication, semiconductor microelectronics, thiab siab R&D chaw, lub platform no muab nruj batch- rau -batch repeatability rau complex optical interference lim, nyuaj tiv thaiv overcoats, thiab semiconductor passivation txheej.
Technical Specifications
|
Parameter |
Specification |
|
Chamber Dimensions |
Φ 600 hli × 600 hli (Kev cai scaling muaj txog Φ 1200 hli) |
|
Qhov kawg Base Siab |
< 5.0 × 10⁻⁵ Pa (Fully baked, dry pumping architecture) |
|
Nqus Pumping Suite |
1600 L/s Magnetically Levitated Turbomolecular Pump rov qab los ntawm cov roj-dawb cag / scroll qhuav twj tso kua mis ua ke |
|
Evaporation Sources |
Multi- hnab tshos E-beam Phom (4 × 10 kW cheb tswj) thiab tiv thaiv qhov chaw thermal |
|
Ion Source Configuration |
Gridless End-Hall / Gridded Kaufman Source (Beam Zog: 50–1500 eV, Ion Current: mus txog 250 mA) |
|
Substrate Fixture |
Variable -ceev planetary rotation theem nrog integrated substrate cua sov mus txog 350 degree |
|
Zaj duab xis Thickness Uniformity |
< ± 1% (measured across Φ 400 mm effective deposition zone) |
|
Txheej Txheem Tswjhwm |
PLC core integrated nrog ib tug muaj PC khiav daim ntawv qhia -tsav SCADA automation software |
Ntsiab nta
Momentum-Enhanced Microstructure:Kev tswj cov ion pab txhawb adatom nto txav mus los, zoo suppressing porous columnar grain loj hlob thiab tshem tawm refractive index hloov los ntawm noo noo nqus.
Dual -Channel Thickness Tawm tswv yim:Integrate dual quartz siv lead ua microbalance (QCM) sojntsuam nrog rau broadband kho qhov muag saib xyuas (BOM) chaw nres nkoj rau tiag tiag -time nanometer- nplai thickness thiab tus nqi tswj.
Ultra-Nqus Nqus Chamber:Tsim los ntawm 304L stainless hlau nrog rau hauv electro- polished tiav, hlau - kaw VAT rooj vag li qub, thiab pneumatic hlau -gasket flanges kom txo qis outgassing.
Kaw -Loop Reactive Gas Regulation:High-precision mass flow controllers (MFCs) meter reactive oxygen, nitrogen, thiab argon gases nrog sub-sccm daws teeb meem kom ruaj ntseg stoichiometric compound txheej.
Nqus System Configuration
Roughing kab:Hermetically kaw, roj- cov twj tso kua mis qhuav qhuav tshem tawm cov pa phem hydrocarbon nyob rau hauv roughing thiab foreline theem.
High Vacuum Integration:Maglev turbomolecular twj tso kua mis txuas ncaj qha mus rau lub ntsiab chamber ntawm siab -kev coj tus kheej pneumatic lub rooj vag li qub ua rau kom nrawm nrawm rau cov txheej txheem thiab cov dej vapors seem.
Vacuum Diagnostics:Redundant Pirani thiab Cold Cathode gauges muab txuas ntxiv, hla -calibrated siab txiav los ntawm huab cua mus rau 10⁻⁷ Pa.
Evaporation Materials & Substrate Compatibility
Cov khoom siv Evaporant:Dielectric oxides: SiO₂, TiO₂, Ta₂O₅, Nb₂O₅, HfO₂, Al₂O₃
Fluorides:MgF₂, LaF₃
Refractory hlau:Au, Ag, Al, Ti, Cr, NiCr
Cov substrate:Optical iav blanks (BK7, fused silica, quartz), semiconductor wafers (Silicon, GaAs), ib leeg -crystal substrates (LiNbO₃, sapphire), thiab precision hlau Cheebtsam.
Daim ntawv thov
Precision Optics:Narrowband wavelength-division multiplexing (WDM) filters, laser line mirrors, thiab check anti-reflection (AR) coatings for high-power laser systems.
Semiconductor Fabrication:Rooj vag oxide dielectrics, hlau interconnect adhesion noob txheej, thiab ya raws -pab passivation overcoats.
Advanced Optoelectronics:Nyias- zaj duab xis polarizers, waveguide cladding txheej, thiab pob tshab conductive oxide (TCO) kov- vaj huam sib luag zaj duab xis.
Kev kho kom haum
Chamber Enclosures:Vertical cylinder tswb-jars, dual- qhov rooj square box configurations, los yog cleanroom pass-los ntawm kev tsim.
Source Modularity:Kev cai crucible suav suav, theem nrab magnetron sputtering cathode kev koom ua ke, lossis tshwj xeeb RF bias fais fab teeb tsa.
Automation Architecture:Tiav PLC sib cuam tshuam logic, SCADA kev tso cai kev ruaj ntseg tiers, thiab SECS/GEM host cov ntaub ntawv-cov txheej txheem kaw.
Kev Tswj Xyuas Zoo
Component Validation:Tag nrho cov qauv flanges, lub tshuab nqus tsev feedthroughs, hluav taws xob hluav taws xob, thiab cov tswj cov dej num loj tau raug kuaj xyuas tus kheej qhov ntev thiab hluav taws xob lub rooj zaum ua ntej kev sib dhos.
Leak Certification:Cov chav sib xyaw ua ke raug kuaj xyuas helium mass spectrometer; qhov tsis lees paub qhov pib yuav tsum nyob qis dua 1.0 × 10⁻⁹ Pa·m³ / s.
Factory Txais Kev Xeem (FAT):Ib qho yuav tsum tau ua 72-teev qhuav tas li- khiav validation npog lub twj tso kua mis drawdown curves, multi-axis planetary rotation mechanics, interlock kev nyab xeeb loops, thiab e-beam phom emission stability.
Installation & Technical Support
Cov ntaub ntawv:Nkoj nrog cov duab kos duab sib dhos, hluav taws xob schematics, P&ID layouts, PLC logic qhov chaw sau npe, thiab kev tiv thaiv kev saib xyuas.
Ntawm -Site Commissioning:Cov kws ua haujlwm pabcuam hauv chaw ua haujlwm ncaj qha qhov chaw kho tshuab, cov khoom siv hluav taws xob sib txuas (lub zog, dej txias, cua compressed), thiab pib qhov system ci - tawm.
Kev cob qhia txheej txheem:Nws suav nrog kev ntsuas qhov ntsuas hauv paus, ion qhov chaw ntsuas qhov ntsuas, thiab kev cob qhia tus neeg ua haujlwm kev nyab xeeb raws tu qauv.
Lifecycle Care:Kev txhawb nqa kev kuaj mob nyob deb dhau los ntawm encrypted VPN modules, cov khoom seem hauv cheeb tsam, thiab teem caij kuaj xyuas.
FAQ
Q: Txheej thickness soj ntsuam li cas thaum lub sij hawm ntau - txheej deposition khiav?
A: Lub kaw lus siv dual quartz siv lead ua microbalances (QCM) rau qhov tiag -lub sij hawm tus nqi thiab thickness nrhiav. Rau qhov nyuaj kho qhov muag cuam tshuam pawg, nws koom nrog broadband kho qhov muag saib xyuas cov txheej txheem los kho cov txheej txheem txiav tawm ncaj qha los ntawm spectral transmission curves.
Q: Dab tsi ntawm cov khoom siv hluav taws xob xav tau ntawm qhov chaw teeb tsa?
A: Kev Siv Hluav Taws Xob: 3-theem, 380V / 480V, 50 / 60Hz (configured per regional grid standard).
Dej txias: Kub 15-20 degree, qhov tsawg kawg nkaus ntws 30 L / min, muab siab 0.3-0.4 MPa.
Process Gases: Ultra-high purity (>99.999%) Ar, O₂, thiab N₂ tswj kom huv si ntawm 0.15 MPa.
Q: Lub sij hawm ua tus txheej txheem yog dab tsi los ntawm kev txiav txim rau kev xa khoom?
A: Cov qauv kev teeb tsa feem ntau xav tau 16 txog 20 lub lis piam. Qhov loj me ntawm lub chamber loj lossis ntau- qhov chaw sib koom ua ke platforms xav tau 24 mus rau 30 lub lis piam, nyob ntawm kev tsim qauv kos npe kos npe -tawm thiab tshwj xeeb kev yuav khoom.
Cim npe nrov: ion-pab thin film deposition system, Tuam Tshoj ion-pab thin film deposition system manufacturers, lwm tus neeg, Hoobkas
