Ion{0}}Cov khoom siv nqus tsev vacuum

Lub Ion-Assisted Vacuum Evaporation System koom ua ke siab -nqus thermal lossis electron-beam evaporation qhov chaw nrog Kaufman- hom lossis End-Hall ion qhov chaw. Los ntawm kev sib tsoo cov zaj duab xis loj hlob nrog cov roj ionized (Ar lossis O2) thaum lub sij hawm lub cev vapor deposition (PVD), lub kaw lus hloov kinetic zog rau adatoms, suppressing columnar microstructure thiab tiv thaiv kom txhob ya raws nyob rau hauv optical thiab dielectric nyias films.

Ua kom huv huv kev sib koom ua ke thiab txuas ntxiv ntau- hloov ntau lawm, lub kaw lus ntsuas los ntawm R&D hneev taw (300 mm chamber) mus rau siab -throughput industrial kab (900 mm dual-qhov rooj thiab planetary rotation configurations).

Ze ntawm -Ntau qhov ceev:Elevated adatom nto kev txav mus los tshem tawm cov yeeb yaj kiab porosity thiab ua kom cov neeg kho tshuab hardness.

Intrinsic Stress Tuning:Adjustable ion beam zog neutralizes mechanical stress, tiv thaiv delamination ntawm tuab dielectric stacks.

Tsawg-Thermal- Kev Siv Nyiaj Txiag:Momentum-driven densification tso cai rau siab- txheej txheej ntawm qhov kub thiab txias-sensitive polymer substrates yam tsis muaj thermal distortion.

Daim ntawv qhia Automation:PLC- tswj lub tshuab nqus tsev sib cuam tshuam thiab twj tso kua mis-down sequencing tswj los ntawm kev lag luam kov- vaj huam sib luag HMI nrog cov ntaub ntawv kaw lus.

Roughing Theem:Dual -stage rotary vane mechanical twj tso kua mis ua ke nrog lub hauv paus blower (150 L / s ceev) rau kev hla ceev.

High Vacuum Stage:Magnetically levitated turbomolecular twj tso kua mis (1600 L/s) rov qab los ntawm cov roj-dawb scroll twj tso kua mis kom tshem tawm hydrocarbon backstreaming.

Cryogenic Options:Cov kua nitrogen txias ntxiab thiab cryopump kev koom ua ke rau cov dej qis - vapor ib nrab siab.

Lub tshuab nqus tsev ntsuas:Hla -calibrated Pirani thiab Cold Cathode gauges rau tiag- lub sij hawm tawm tswv yim los ntawm huab cua mus rau 10^-7 Pa.

Cov khoom siv evaporation
Oxides:SiO2, TiO2, Ta2O5, Nb2O5, Al2O3

Fluorides:MgF2, LaF3

Hlau:Al, Ag, Au, Ti, Cr

Substrate Compatibility
Optical Substrates:Fused silica, N-BK7, silicon, germanium, thiab zinc selenide windows.

Semiconductor Wafers:100 hli mus rau 300 hli silicon thiab compound semiconductor wafers.

Polymers:PET, PI (Polyimide), thiab PMMA cov yeeb yaj kiab uas siv cov -kub IAD qhov ntsuas qis.

Precision Optics:Los tiv thaiv -cov xim xaim (AR) txheej, tsom iav laser, thiab cov ntxaij lim dej nqaim uas xav tau cov av noo.

Microelectronics:Hlau rooj vag electrodes, adhesion txheej, thiab passivation barriers nyob rau hauv semiconductor ntim.

Optoelectronics:Transparent conductive oxide (TCO) tiv tauj thiab OLED ya raws -txheej txheej encapsulation.

Chamber Geometry:Rectangular los yog cylindrical tsim kom haum rau cov chav huv huv tsis txwv.

Multi-Kev sib xyaw ua ke:Co-kev teeb tsa evaporation haum rau peb lub E- nqaj phom thiab plaub lub nkoj thermal.

Hauv -Situ Metrology Ports:Flange integration ports rau spectroscopic ellipsometers lossis optical saib xyuas tshuab.

Qib Automation:Semi-kev tshawb fawb tsis siv neeg tsim los yog tag nrho automated cassette-rau-cassette wafer tuav.

Leak Detection:Helium huab hwm coj spectrometer ntsuam xyuas ntawm txhua chav nrog ib tug nruj rejection pib ntawm <1 x 10^-9 Pa*m^3/s.

Kev kuaj xyuas huv huv:Residual gas analyzer (RGA) scan ua ntej- xa khoom tuaj xyuas kom paub tseeb tias xoom organic hydrocarbons.

System Hlawv-In:72- teev tas mus li qhuav-khiav kev sim ntawm cov tshuab tsav, cua txias manifolds, thiab hluav taws xob cuam tshuam.

Cov ntaub ntawv:Cov ntaub ntawv pov thawj zeb xeem (MTRs), hluav taws xob schematics, thiab Factory Acceptance Test (FAT) qhia.

Kev npaj qhov chaw:Detailed facility guide covering floor loading, chilled water (>= 5 m^3/h), huab cua qhuav (CDA), thiab tso pa tawm.

Kev Ua Haujlwm:Kev xa mus rau qhov chaw ua haujlwm rau kev sib tw tshuab, kev sib txuas hluav taws xob, lub tshuab nqus tsev, thiab daim ntawv qhia kos npe - tawm.

Kev cob qhia neeg ua haujlwm:5-hnub nyob rau ntawm qhov kev pab cuam npog kev ua haujlwm, kev tiv thaiv kev saib xyuas, kev daws teeb meem, thiab kev cuam tshuam kev nyab xeeb.

Spare xeem:Cov khoom siv tseem ceeb (filaments, QCM crystals, seals, turbomolecular bearings) stocked regional.